X-ray methods to the characterization of thin coatings
نویسندگان
چکیده
منابع مشابه
Characterization of multilayer coatings by X-ray reflection
2014 Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are reviewed. Inversion methods are successful for coatings with few layers and give the thickness of each layer and the roughness of each interface. A statistical description of the coating is used for coatings with many layers, and simple formulas are given to derive the average thickness error and ...
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ژورنال
عنوان ژورنال: Acta Crystallographica Section A Foundations of Crystallography
سال: 1996
ISSN: 0108-7673
DOI: 10.1107/s0108767396078543